Stellar Industries
Thermal Management Specialists

Thin Film Design Guidelines

Thin Substrate Chart

Sub Material Criteria:

I. Types:

  • Al2O3: 96%, 99.5%, 99.6%
  • Sapphire [100% Al2O3]
  • BeO: 99.5% [Special-325W/mK]
  • AlN [170W/mK or 200W/mK]

II. Sizes:

  • Preferred Standard Length & Width
  • Al2O3 @ 96%: 2"Sq., 2.25"Sq.
  • Al2O3 @ 99.5%: 2"Sq.& 2.25"Sq.
  • Al2O3 @ 99.6%: 4" Diameter
  • Sapphire: 2" Diameter
  • BeO: 2.06"Sq., 2.3"X2.9", 3.7"Sq.
  • AlN: 2"Sq., 3"Sq. (Special: All types offer alternate sizes depending upon availability of material at time of order entry)
  • Preferred Standard Thickness
  • 0.010", 0.015", 0.025", 0.040"
  • Lapped/Polished to Customer Request

III. Length & Width Tolerance:

  • Diced Edge: Standard: 0.002"
  • Special: 0.001"

IV. Thickness Tolerance:

  • As Fired: 10%
  • Polished: 0.0005"

V. Polished Surface Finishes:

  • 96% Al2O3: 3-in Max
  • 99% Al2O3: 1-in Max
  • BeO: 4-in Max
  • AlN: 2-in Max

Metalized Material Criteria:

I. THN Metals Offered:

  • PVD Deposited (purpose):
  • Ti: 1000-1500 (Adhesion)
  • NiCr: 1000-1500 (Adhesion)
  • Pt: 2000-3000 (Barrier)
  • Ni: 2000-3000 (Barrier)
  • Au: 1500-10,000
  • PVD up to 10,000 [1m]
  • Plating >1m
  • Cu: 20,000 MIN.

II. Pattern Tolerance:

  • Minimum Trace/Space Size: [Metal ThicknessX10] + 0.002"
  • Metal Feature Size:
  • Milled: 0.0005" for <5000
  • 0.001" for >5000
  • Liftoff: 0.001"
  • Etched: [Metal ThicknessX5] + 0.0005"
  • Minimum Metal Pullback: As Fired Sub Edge: 0.100" | Diced Edge: Front Side: 0.001"0.001"
  • Back Side: 0.002"0.002"
  • Single Diced Critical Edge: 0.0004"0.0004" or 0.0005"0.0005"
  • Laser Feature: 0.010"0.005"

III. Finishes Available:

  • Electroless or Electrolytic Ni:
  • Standard: 50-in or 100-in Nominal
  • Special: Upon Request
  • Electroless or Electrolytic Au:
  • Standard: (Flash) 4-10-in
  • Special: Upon Request
  • 40-in+: Requires pull test tab
  • AuSn Coating
  • Compositions: 75/25 or Requested
  • Standard Thickness: 4 - 8m
  • Standard Thickness Tolerance: 1m
  • Location Tolerance: 0.002"
  • Standard Barrier Metal: Pt: 5000
  • Other Offered Barriers: Ti/Pt or Ni
  • Au Overcoat Offered: 1000+200/-000
  • Standard Flush with Base Metal with potential for 0.004" overspray all edges
  • Minimum Overlay Feature Size: 0.005"
  • Laser Ablated Solder Dams: 0.010"0.001"

IV. Thru-holes:

  • Hole Size: Standard 1:1 Ratio | Between hole diameter & Ceramic thickness
  • Special: Upon Request
  • Minimum Distance Hole Edge to Diced Part Edge to be equal towhichever is larger between ceramic thickness or hole diameter
  • See Laser Feature Pullback Criteria above
 
 

Stellar Industries Corp. 50 Howe Avenue Millbury, MA 01527 | 508.865.1668 | sales@stellarind.com

TERMS AND CONDITIONS